Proceedings, IEEE the Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and systems : Heidelberg, Germany, January 25-29, 1998 : soft : case : micro

Proceedings, IEEE the Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and systems : Heidelberg, Germany, January 25-29, 1998 : soft

Material type: 図書

Author: sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Ministry of Economic Affairs of Baden-Württemberg

Publisher: IEEE Service Center

Publication date: c1998

Material Format: Paper

Capacity, size, etc.: 30 cm

NDC: -

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Notes on use

Note (General)：: "IEEE catalog number: 98CH36176"Includes bibliographical references

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Paper

Material Type: 図書
ISBN: 078034412X
0780344138
0780344146
Title: Proceedings, IEEE the Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and systems : Heidelberg, Germany, January 25-29, 1998
Volume: : soft
: case
: micro
Author/Editor: sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Ministry of Economic Affairs of Baden-Württemberg
Author Heading: IEEE Robotics and Automation Society
https://ci.nii.ac.jp/author/DA04995713
IEEE Workshop on Micro Electro Mechanical Systems
https://ci.nii.ac.jp/author/DA04552610
American Society of Mechanical Engineers. Dynamic Systems and Control Division
https://ci.nii.ac.jp/author/DA04247639
Ministry of Economic Affairs of Baden-Württemberg
Publication, Distribution, etc.: IEEE Service Center
Publication Date: c1998
Publication Date (W3CDTF): 1998
Size: 30 cm
Alternative Title: MEMS
MEMS98
98CH36176
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Electromechanical devices -- Congresses
Miniature objects -- Congresses
Microelectronics -- Congresses
Robotics -- Congresses
Target Audience: 一般
Note (General): "IEEE catalog number: 98CH36176"
Includes bibliographical references
Related Material (URI): https://ci.nii.ac.jp/ncid/BA3732636X#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA3732636X : BA3732636X