次世代高集積回路(LSI)用クラスターイオン注入装置の試作研究

Notes on use

Search by Bookstore

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
Paper
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 図書
Title: 次世代高集積回路(LSI)用クラスターイオン注入装置の試作研究
Title Transcription: ジセダイコウシュウセキカイロ LSI ヨウクラスターイオンチュウニュウソウチノシサクケンキュウ
Author/Editor: 山田公研究代表
Author Heading: 山田, 公ヤマダ, イサオ
https://ci.nii.ac.jp/author/DA05853383
京都大学工学部附属イオン工学実験施設キョウトダイガクコウガクブフゾクイオンコウガクジッケンシセツ
https://ci.nii.ac.jp/author/DA01781473
Publication, Distribution, etc.: [山田公]
Publication Date: 1995.3
Publication Date (W3CDTF): 1995
Size: 30cm
Alternative Title: 平成4〜6年度科学研究費補助金試験研究(B)(1)研究成果報告書 : 課題番号 04555003
Place of Publication (Country Code): ja
Target Audience: 一般
Note (General): 京都大学工学部附属イオン工学実験施設
Related Material (URI): https://ci.nii.ac.jp/ncid/BA74116060#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA74116060 : BA74116060