気体分離配線構造を有するTaゲート金属基板SOI超高速超微細LSIの開発

Notes on use

Related materials as well as pre- and post-revision versions

Search by Bookstore

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
Paper
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 図書
Title: 気体分離配線構造を有するTaゲート金属基板SOI超高速超微細LSIの開発
Title Transcription: キタイブンリハイセンコウゾウオユウスル TA ゲートキンゾクキバン SOI チョウコウソクチョウビサイ LSI ノカイハツ
Author/Editor: 研究代表者大見忠弘
Author Heading: 大見, 忠弘オオミ, タダヒロ
https://ci.nii.ac.jp/author/DA0838100X
須川, 成利スガワ, シゲトシ
小谷, 光司コタニ, コウジ
平山, 昌樹ヒラヤマ, マサキ
Publication, Distribution, etc.: [大見忠弘]
Publication Date: 2002.3
Publication Date (W3CDTF): 2002
Size: 30cm
Place of Publication (Country Code): ja
Target Audience: 一般
Note (General): 研究分担者: 須川成利, 小谷光司, 平山昌樹
Related Material: 科学研究費補助金(基盤研究(A)(2))研究成果報告書
https://cir.nii.ac.jp/crid/1130000794685227008
Related Material (URI): https://ci.nii.ac.jp/ncid/BB06298358#entity
Periodical Title: 科学研究費補助金(基盤研究(A)(2))研究成果報告書
https://cir.nii.ac.jp/crid/1130000794685227008
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB06298358 : BB06298358