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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 0819458309
- Author/Editor
- Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--the Society for Microelectronics, Micro- and Precision Engineering (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe (Germany) ; cooperating organizations, SEMI Europe ... [et al.] ; copublished by, SPIE--the International Society for Optical Engineering and VDE Verlag GmbH (Germany)
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- c2005
- Publication Date (W3CDTF)
- 2005
- Size
- 28 cm
- Alternative Title
- European Mask and Lithography ConferenceEuropean Conference on Mask Technology for Integrated Circuits and MicrocomponentsMask and lithography