DCアーク、RF、マグネトロンプラズマを利用した機能性材料の製造および表面改質

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Material Type: 図書
Title: DCアーク、RF、マグネトロンプラズマを利用した機能性材料の製造および表面改質
Title Transcription: DC アーク RF マグネトロンプラズマオリヨウシタキノウセイザイリョウノセイゾウオヨビヒョウメンカイシツ
Author/Editor: 冨井洋一研究代表
Author Heading: 冨井, 洋一トミイ, ヨウイチ
https://ci.nii.ac.jp/author/DA13632470
京都大学大学院工学研究科キョウトダイガクダイガクインコウガクケンキュウカ
https://ci.nii.ac.jp/author/DA12826609
Publication, Distribution, etc.: [冨井洋一]
Publication Date: 1995.3
Publication Date (W3CDTF): 1995
Size: 30cm
Alternative Title: 平成6年度科学研究費補助金試験研究(B)(1)研究成果報告書 : 課題番号 05555189
Place of Publication (Country Code): ja
Target Audience: 一般
Note (General): 京都大学工学部
Related Material (URI): https://ci.nii.ac.jp/ncid/BA74100683#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA74100683 : BA74100683