2001 6th International Symposium on Plasma- and Process-Induced Damage, May 13-15, 2001, Monterey, California, USA : soft.

Material type: 図書

Author: Manfred Engelhardt, Terence Hook, and Calvin T. Gabriel, ; technical co-sponsors, American Vacuum Society, IEEE/Electron Devices Society, Japanese Society of Applied Physics

Publisher: American Vacuum Society - Northen California Chapter

Publication date: c2001

Material Format: Paper

Capacity, size, etc.: 28 cm

NDC: -

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Notes on use

Note (General)：: "P2ID"-- on cover"IEEE Catalog Number (softbound) 01TH8583" -- T. p. versoIncludes bibliographical references and index

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Paper

Material Type: 図書
ISBN: 096515775X
Title: 2001 6th International Symposium on Plasma- and Process-Induced Damage, May 13-15, 2001, Monterey, California, USA
Volume: : soft.
Author/Editor: Manfred Engelhardt, Terence Hook, and Calvin T. Gabriel, ; technical co-sponsors, American Vacuum Society, IEEE/Electron Devices Society, Japanese Society of Applied Physics
Author Heading: International Symposium on Plasma Process-Induced Damage
https://ci.nii.ac.jp/author/DA13150844
Engelhardt, Manfred
Hook, Terence
Gabriel, Calvin T.
https://ci.nii.ac.jp/author/DA10596199
IEEE Electron Devices Society
https://ci.nii.ac.jp/author/DA01257512
American Vacuum Society
https://ci.nii.ac.jp/author/DA03926125
応用物理学会オウヨウブツリガッカイ
https://ci.nii.ac.jp/author/DA00633233
Publication, Distribution, etc.: American Vacuum Society - Northen California Chapter
Publication Date: c2001
Publication Date (W3CDTF): 2001
Size: 28 cm
Alternative Title: 01TH8538
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Semiconductor wafers -- Defects -- Congresses
Semiconductors -- Effect of radiation on -- Congresses
Plasma etching -- Congresses
Target Audience: 一般
Note (General): "P2ID"-- on cover
"IEEE Catalog Number (softbound) 01TH8583" -- T. p. verso
Includes bibliographical references and index
Related Material (URI): https://ci.nii.ac.jp/ncid/BA52793939#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA52793939 : BA52793939