図書

2001 6th International Symposium on Plasma- and Process-Induced Damage, May 13-15, 2001, Monterey, California, USA : soft.

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2001 6th International Symposium on Plasma- and Process-Induced Damage, May 13-15, 2001, Monterey, California, USA : soft.

Material type
図書
Author
Manfred Engelhardt, Terence Hook, and Calvin T. Gabriel, ; technical co-sponsors, American Vacuum Society, IEEE/Electron Devices Society, Japanese Society of Applied Physics
Publisher
American Vacuum Society - Northen California Chapter
Publication date
c2001
Material Format
Paper
Capacity, size, etc.
28 cm
NDC
-
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Notes on use

Note (General):

"P2ID"-- on cover"IEEE Catalog Number (softbound) 01TH8583" -- T. p. versoIncludes bibliographical references and index

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Paper

Material Type
図書
ISBN
096515775X
Volume
: soft.
Author/Editor
Manfred Engelhardt, Terence Hook, and Calvin T. Gabriel, ; technical co-sponsors, American Vacuum Society, IEEE/Electron Devices Society, Japanese Society of Applied Physics
Publication Date
c2001
Publication Date (W3CDTF)
2001
Size
28 cm