Chemical Vapor Deposition of Ga<sub>2</sub>O<sub>3</sub>Thin Films on Si Substrates
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- Material Type
- 記事
- Publication Date
- 2002-02-20
- Publication Date (W3CDTF)
- 2002-02-20
- Periodical title
- Bulletin of the Korean Chemical Society
- No. or year of volume/issue
- 23 2
- Volume
- 23
- Issue
- 2
- Pages
- 225-228
- Publication date of volume/issue (W3CDTF)
- 2002-02-20