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Characteristics of rare-earth element erbium implanted in silicon

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Characteristics of rare-earth element erbium implanted in silicon

Material type
記事
Author
Y. S. Tangほか
Publisher
AIP Publishing
Publication date
1989-07-31
Material Format
Digital
Journal name
Applied Physics Letters 55 5
Publication Page
p.432-433
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Detailed bibliographic record

Summary, etc.:

<jats:p>Rare-earth element erbium implanted into silicon was studied by photoluminescence and Rutherford backscattering analysis. Two sets of luminesc...

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Digital

Material Type
記事
Publication Date
1989-07-31
Publication Date (W3CDTF)
1989-07-31
Periodical title
Applied Physics Letters
No. or year of volume/issue
55 5
Volume
55
Issue
5
Pages
432-433