異方性エッチングによる規則的マイクロテクスチャ面の創成

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Summary, etc.：: 高さが数μm程度で代表寸法が数μmの単位規則形状が規則的に配列したマイクロテクスチャ表面は,MEMSにおける摺動面の摩擦制御,光の特定波長反射面などさまざまな応用が期待できる．本研究では,SiO2あるいはSi3N4薄膜付きの単結晶Si基板について,薄膜をマスクとし,液相エッチングを用いて容易に任意の...

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Material Type: 記事
Title: 異方性エッチングによる規則的マイクロテクスチャ面の創成
Author Heading: 市橋健吾
角田陽
Publication Date: 2011
Publication Date (W3CDTF): 2011
Periodical title: 精密工学会学術講演会講演論文集
No. or year of volume/issue: 2011A 0
Volume: 2011A
Issue: 0
Pages: 363-364
Publication date of volume/issue (W3CDTF): 2011
Publication (Periodical Title): The Japan Society for Precision Engineering
Subject Heading: wet etching
single crystal Si
SiO2
Si3N4
micro texture
液相エッチング
単結晶シリコン
酸化シリコン
窒化シリコン
マイクロテクスチャ
Target Audience: 一般
DOI: 10.11522/pscjspe.2011a.0.363.0
Data Provider (Database): 国立情報学研究所 : CiNii Research
https://cir.nii.ac.jp/
Original Data Provider (Database): Japan Link Center
https://japanlinkcenter.org/top
CiNii Articles
NAID: 130004660192