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Copper electroplating process for sub-half-micron ULSI structures UCRL-JC-119725 DE95 014674 CONF-95062061

Copper electroplating process for sub-half-micron ULSI structures UCRL-JC-119725 DE95 014674 CONF-95062061
Microform規格・テクニカルリポート類
Contolini, R. J, Tarte, L, Graff, R. T, Evans, L. B, Cox, J. N1995<LS-DE95/014674>
National Diet Library

ELECTROCHEMICAL PLANARIZATION FOR MICROELECTRONIC CIRCUITS (UCRL ; UCRL-JC-113618)

ELECTROCHEMICAL PLANARIZATION FOR MICROELECTRONIC CIRCUITS (UCRL ; UCRL-JC-113618)
Paper図書
CONTOLINI, R.J.// MAYER, S.T.// BERNHARDT, A.F. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1993.
Other Libraries in Japan
  • Author HeadingCONTOLINI, R.J. MAYER, S.T. BERNHARDT, A.F.

AEROGELS FOR MICROELECTRONIC APPLICATIONS: FAST, INEXPENSIVE, AND LIGHT AS AIR (UCRL ; UCRL-JC-113650)

AEROGELS FOR MICROELECTRONIC APPLICATIONS: FAST, INEXPENSIVE, AND LIGHT AS AIR (UCRL ; UCRL-JC-113650)
Paper図書
CONTOLINI, R.J.// HRUBESH, L.W.// BERNHARDT, A.F. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1993.
Other Libraries in Japan
  • Author HeadingCONTOLINI, R.J. HRUBESH, L.W. BERNHARDT, A.F.

COPPER ELECTROPLATING PROCESS FOR SUB-HALF-MICRON ULSI STRUCTURES (UCRL ; UCRL-JC-119725)

COPPER ELECTROPLATING PROCESS FOR SUB-HALF-MICRON ULSI STRUCTURES (UCRL ; UCRL-JC-119725)
Paper図書
CONTOLINI, R.J.// TARTE, L.// GRAFF, R.T.// EVANS, L.B.// COX, J.N.// PUICH, M.R.// GEE, J.D.// MU, XIAO-CHUN// CHIANG, CHIEN. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1995.
Other Libraries in Japan
  • Author HeadingCONTOLINI, R.J. TARTE, L. GRAFF, R.T. EVANS, ...

EMBEDDED CONDUCTORS BY ELECTROCHEMICAL PLANARIZATION. (UCRL ; UCRL-100692)

EMBEDDED CONDUCTORS BY ELECTROCHEMICAL PLANARIZATION. (UCRL ; UCRL-100692)
Paper図書
CONTOLINI, R.J.(et al.)California Univ., Livermore (USA). Lawrence Livermore Lab(California Univ., Livermore (USA). Lawrence Livermore Lab)1989.
Other Libraries in Japan
  • Author HeadingCONTOLINI, R.J.

DESIGN CALCULATIONS FOR THE MICROCHANNEL HEATSINK (UCRL ; UCRL-JC-105120)

DESIGN CALCULATIONS FOR THE MICROCHANNEL HEATSINK (UCRL ; UCRL-JC-105120)
Paper図書
RIDDLE, R.A.// CONTOLINI, R.J.// BERNHARDT, A.F. (LAWRENCE LIVERMORE NATIONAL LAB., CA (USA))University of California Research Laboratory(University of California Research Laboratory)1991.
Other Libraries in Japan
  • Author HeadingRIDDLE, R.A. CONTOLINI, R.J. BERNHARDT, A.F.

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