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Beam injection assessment of defects in semiconductors : proceedings of the 5th international workshop on beam injection assessment of defects in semiconductors (BIADS 98), held in Parkhotel Schloss Wulkow near Berlin, Germany, August 30-September 3, 1998. : Aug 1998, ------. (Diffusion and Defect Data, Solid State Data ; Diffusion and Defect Data Part B Solid State Phenomena ; 63-64)

Beam injection assessment of defects in semiconductors : proceedings of the 5th international workshop on beam injection assessment of defects in semiconductors (BIADS 98), held in Parkhotel Schloss Wulkow near Berlin, Germany, August 30-September 3, 1998. : Aug 1998, ------. (Diffusion and Defect Data, Solid State Data ; Diffusion and Defect Data Part B Solid State Phenomena ; 63-64)
Paper図書
Scitec Publicationsc1998.<M17-05-1562>
National Diet Library
  • Author HeadingInstitut fur Halbleiterphysik Frankfurt an der Oder. Kittler, M, Ed.

Gettering and defect engineering in semiconductor technology : 7th International autumn meeting : Oct 1997, Spa, Belgium. (Diffusion and Defect Data Part B Solid State Phenomena ; 57,58)

Gettering and defect engineering in semiconductor technology : 7th International autumn meeting : Oct 1997, Spa, Belgium. (Diffusion and Defect Data Part B Solid State Phenomena ; 57,58)
Paper図書
<M17-97-2095>
National Diet Library
  • Author HeadingInteruniversity Micro-Electronics Center. Institut fur Halbleiterphysik Frankfurt an der Oder.

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