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Influence of grain structure on the reliability of narrow Al- based interconnects UCRL-JC-120336 DE95 015883 CONF-95041232

Influence of grain structure on the reliability of narrow Al- based interconnects UCRL-JC-120336 DE95 015883 CONF-95041232
Microform規格・テクニカルリポート類
Kang, S. H, Kim, C, Genin, F. Y1995<LS-DE95/015883>
National Diet Library

Mechanism of electromigration failure in Al thin film interconnects containing Sc UCRL-JC-120337 DE95 015880 CONF-95041233

Mechanism of electromigration failure in Al thin film interconnects containing Sc UCRL-JC-120337 DE95 015880 CONF-95041233
Microform規格・テクニカルリポート類
Kim, C, Kang, S. H, Morris, J. W, Genin, F. Y1995<LS-DE95/015880>
National Diet Library

MECHANISM OF ELECTROMIGRATION FAILURE IN AL THIN FILM INTERCONNECTS CONTAINING SC (UCRL ; UCRL-JC-120337)

MECHANISM OF ELECTROMIGRATION FAILURE IN AL THIN FILM INTERCONNECTS CONTAINING SC (UCRL ; UCRL-JC-120337)
Paper図書
KIM, CHOONG-UN// KANG, S.H.// MORRIS, J.W. JR.// GENIN, F.Y. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1995.
Other Libraries in Japan
  • Author HeadingKIM, CHOONG-UN KANG, S.H. MORRIS, J.W. JR. GENIN, F.Y.

INFLUENCE OF GRAIN STRUCTURE ON THE RELIABILITY OF NARROW ALBASED INTERCONNECTS (UCRL ; UCRL-JC-120336)

INFLUENCE OF GRAIN STRUCTURE ON THE RELIABILITY OF NARROW ALBASED INTERCONNECTS (UCRL ; UCRL-JC-120336)
Paper図書
KANG, S.H.// KIM, C.L MORRIS, J.W. JR.// GENIN, F.Y. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1995.
Other Libraries in Japan
  • Author HeadingKANG, S.H. KIM, C.L MORRIS, J.W. JR. GEN...

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