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Image degradation from surface scatter in EUV optics UCRL-JC-123007 DE96 013665 CONF-96049318

Image degradation from surface scatter in EUV optics UCRL-JC-123007 DE96 013665 CONF-96049318
Microform規格・テクニカルリポート類
Gaines, D. P, Daly, T. P, Stearns, D. G, LaFontaine, B, Sweeney, D. W1996<LS-DE96/013665>
National Diet Library

Measuring the effect of scatter on the performance of a lithography system UCRL-JC-123064 DE96 012225 CONF-96049312

Measuring the effect of scatter on the performance of a lithography system UCRL-JC-123064 DE96 012225 CONF-96049312
Microform規格・テクニカルリポート類
La Fontaine, B, Daly, T. P, Chapman, H. N, Gaines, D. P, Stearns, D. G1996<LS-DE96/012225>
National Diet Library

Characterization of SAL605 negative resist at [lambda]=13 nm UCRL-JC-123012 DE96 012224 CONF-96049314

Characterization of SAL605 negative resist at [lambda]=13 nm UCRL-JC-123012 DE96 012224 CONF-96049314
Microform規格・テクニカルリポート類
La Fontaine, B, Ciarlo, D, Gaines, D. P, Kania, D. R1996<LS-DE96/012224>
National Diet Library

Performance of a two-mirror, four-reflection, ring-field optical system at (lambda)=13 nm UCRL-JC-123013 DE96 013883 CONF-96049317

Performance of a two-mirror, four-reflection, ring-field optical system at (lambda)=13 nm UCRL-JC-123013 DE96 013883 CONF-96049317
Microform規格・テクニカルリポート類
La Fontaine, B, Gaines, D. P, Kania, D. R, Sommargren, G. E, Baker, S. L1996<LS-DE96/013883>
National Diet Library

IMAGE DEGRADATION FROM SURFACE SCATTER IN EUV OPTICS (UCRL ; UCRL-JC-123007)

IMAGE DEGRADATION FROM SURFACE SCATTER IN EUV OPTICS (UCRL ; UCRL-JC-123007)
Paper図書
GAINES, D.P.// DALY, T.P.// STEARNS, D.G.// LAFONTAINE, B.// SWEENEY, D.W.// FUCHS, D. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1996.
Other Libraries in Japan
  • Author HeadingGAINES, D.P. DALY, T.P. STEARNS, D.G. LAFONTAINE, B. SWEENEY, D.W. FUCHS, D.

CHARACTERIZATION OF SAL605 NEGATIVE RESIST AT .LAMBDA.=13 NM (UCRL ; UCRL-JC-123012)

CHARACTERIZATION OF SAL605 NEGATIVE RESIST AT .LAMBDA.=13 NM (UCRL ; UCRL-JC-123012)
Paper図書
LA FONTAINE, B.// CIARLO, D.// GAINES, D.P.// KANIA, D.R. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1996.
Other Libraries in Japan

PERFORMANCE OF A TWO-MIRROR, FOUR-REFLECTION, RING-FIELD OPTICAL SYSTEM AT .LAMBDA.=13 NM (UCRL ; UCRL-JC-123013)

PERFORMANCE OF A TWO-MIRROR, FOUR-REFLECTION, RING-FIELD OPTICAL SYSTEM AT .LAMBDA.=13 NM (UCRL ; UCRL-JC-123013)
Paper図書
LA FONTAINE, B.// GAINES, D.P.// KANIA, D.R.// SOMMARGREN, G.E.// BAKER, S.L.// CIARLO, D. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1996.
Other Libraries in Japan

PRECISION OPTICAL ASPHERES FOR EXTREME ULTRAVIOLET LITHOGRAPHY (UCRL ; UCRL-JC-123033)

PRECISION OPTICAL ASPHERES FOR EXTREME ULTRAVIOLET LITHOGRAPHY (UCRL ; UCRL-JC-123033)
Paper図書
KANIA, D.R.// GAINES, D.P.// SWEENEY, D.S.// SOMMARGREN, G.E.// LA FONTAINE, B.// VERNON, S.P.// TICHNOR, D.A.// BJORKHOLM, J.E.// ZERNIKE, F.// KESTNER, R.N. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1996.
Other Libraries in Japan

MEASURING THE EFFECT OF SCATTER ON THE PERFORMANCE OF A LITHOGRAPHY SYSTEM (UCRL ; UCRL-JC-123064)

MEASURING THE EFFECT OF SCATTER ON THE PERFORMANCE OF A LITHOGRAPHY SYSTEM (UCRL ; UCRL-JC-123064)
Paper図書
LA FONTAINE, B.// DALY, T.P.// CHAPMAN, H.N.// GAINES, D.P.// STEARNS, D.G.// SWEENEY, D.W.// KANIA, D.R. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1996.
Other Libraries in Japan

TEMPERATURE DETERMINATION IN X-RAY LASER PLASMAS BY THOMSON SCATTERING (UCRL ; UCRL-JC-109721)

TEMPERATURE DETERMINATION IN X-RAY LASER PLASMAS BY THOMSON SCATTERING (UCRL ; UCRL-JC-109721)
Paper図書
VILLENEUVE, D.M.// LA FONTAINE, B.// BALDIS, H.A.// DUNN, J.// ENRIGHT, G.D.// ROSEN, M.D.// YOUNG, P.E.// MATTHEWS, D.L. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1992.
Other Libraries in Japan

UV THOMSON SCATTERING FROM X-RAY LASER PLASMAS (UCRL ; UCRL-JC-105905)

UV THOMSON SCATTERING FROM X-RAY LASER PLASMAS (UCRL ; UCRL-JC-105905)
Paper図書
LA FONTAINE, B.// BALDIS, H.A.// VILLENEUVE, D.M.// BERNARD, J.E.// ENRIGHT, G.D.// ROSEN, M.D.// YOUNG, P.E.// MATTHEWS, D.L. (LAWRENCE LIVERMORE NATIONAL LAB., CA (USA))University of California Research Laboratory(University of California Research Laboratory)1991.
Other Libraries in Japan

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