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ECR, ICP, and RIE plasma etching of GaN SAND-96-1139C DE96 010562 CONF-96050213

ECR, ICP, and RIE plasma etching of GaN SAND-96-1139C DE96 010562 CONF-96050213
Microform規格・テクニカルリポート類
Shul, R. J, McClellan, G. B, Rieger, D. J, Hafich, M. J1996<LS-DE96/010562>
National Diet Library

ICP etching of GaAs via hole contacts SAND-96-1901C DE96 013184 CONF-9610401

ICP etching of GaAs via hole contacts SAND-96-1901C DE96 013184 CONF-9610401
Microform規格・テクニカルリポート類
Shul, R. J, Baca, A. G, Briggs, R. D, McClellan, G. B, Pearton, S. J1996<LS-DE96/013184>
National Diet Library

ECR, ICP, AND RIE PLASMA ETCHING OF GAN (SAND ; SAND-96-1139C)

ECR, ICP, AND RIE PLASMA ETCHING OF GAN (SAND ; SAND-96-1139C)
Paper図書
SHUL, R.J.// MCCLELLAN, G.B.// RIEGER, D.J.// HAFICH, M.J. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
Other Libraries in Japan
  • Author HeadingSHUL, R.J. MCCLELLAN, G.B. RIEGER, D.J. HAFICH, M.J.

ICP ETCHING OF GAAS VIA HOLE CONTACTS (SAND ; SAND-96-1901C)

ICP ETCHING OF GAAS VIA HOLE CONTACTS (SAND ; SAND-96-1901C)
Paper図書
SHUL, R.J.// BACA, A.G.// BRIGGS, R.D.// MCCLELLAN, G.B.// PEARTON, S.J.// CONSTANTINE, C. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
Other Libraries in Japan
  • Author HeadingSHUL, R.J. BACA, A.G. BRIGGS, R.D. MCCLELLAN, G.B. PEARTON, S.J. CONSTANTINE, C.

HIGH TEMPERATURE FURNACE APPLICATION OF CRYOPUMPS. (GEPP ; GEPP-OP-483)

HIGH TEMPERATURE FURNACE APPLICATION OF CRYOPUMPS. (GEPP ; GEPP-OP-483)
Paper図書
MCCLELLAN, G.B.1980.
Other Libraries in Japan
  • Author HeadingMCCLELLAN, G.B.

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