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Modeling aluminum etch chemistry in high density plasmas SAND-97-8585C DE97 053033

Modeling aluminum etch chemistry in high density plasmas SAND-97-8585C DE97 053033
Microform規格・テクニカルリポート類
Meeks, E, Ho, P, Buss, R1997<LS-DE97/053033>
National Diet Library

Chemical kinetics models for semiconductor processing SAND971828C DE98 002574

Chemical kinetics models for semiconductor processing SAND971828C DE98 002574
Microform規格・テクニカルリポート類
Coltrin, M. E, Creighton, J. R, Meeks, E, Grcar, J. F, Houf, W. G1997<LS-DE98/002574>
National Diet Library

Modeling high-density-plasma deposition of SiO(sub 2) in SiH(sub 4)/O(sub 2)/Ar SAND-97-8241 DE97 007010

Modeling high-density-plasma deposition of SiO(sub 2) in SiH(sub 4)/O(sub 2)/Ar SAND-97-8241 DE97 007010
Microform規格・テクニカルリポート類
Meeks, E, Larson, R. S, Ho, P, Apblett, C, Han, S. M1997<LS-DE97/007010>
National Diet Library

AURORA: A FORTRAN program for modeling well stirred plasma and thermal reactors with gas and surface reactions SAND-96-8218 DE96 006554

AURORA: A FORTRAN program for modeling well stirred plasma and thermal reactors with gas and surface reactions SAND-96-8218 DE96 006554
Microform規格・テクニカルリポート類
Meeks, E, Grcar, J. F, Kee, R. J, Moffat, H. K1996<LS-DE96/006554>
National Diet Library

CHEMKIN-III: A FORTRAN chemical kinetics package for the analysis of gas-phase chemical and plasma kinetics SAND-96-8216 DE97 052388

CHEMKIN-III: A FORTRAN chemical kinetics package for the analysis of gas-phase chemical and plasma kinetics SAND-96-8216 DE97 052388
Microform規格・テクニカルリポート類
Kee, R. J, Rupley, F. M, Meeks, E, Miller, J. A1996<LS-DE97/052388>
National Diet Library

Results from modeling and simulation of chemical downstream etch systems SAND-96-8241 DE96 011072

Results from modeling and simulation of chemical downstream etch systems SAND-96-8241 DE96 011072
Microform規格・テクニカルリポート類
Meeks, E, Vosen, S. R, Shon, J. W, Larson, R. S, Fox, C. A1996<LS-DE96/011072>
National Diet Library

AURORA: A FORTRAN PROGRAM FOR MODELING WELL STIRRED PLASMA AND THERMAL REACTORS WITH GAS AND SURFACE REACTIONS (SAND ; SAND-96-8218)

AURORA: A FORTRAN PROGRAM FOR MODELING WELL STIRRED PLASMA AND THERMAL REACTORS WITH GAS AND SURFACE REACTIONS (SAND ; SAND-96-8218)
Paper図書
MEEKS, E.// GRCAR, J.F.// KEE, R.J.// MOFFAT, H.K. (SANDIA NATIONAL LABS., LIVERMORE, CA (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
Other Libraries in Japan
  • Author HeadingMEEKS, E. GRCAR, J.F. KEE, R.J. MOFFAT,...

RESULTS FROM MODELING AND SIMULATION OF CHEMICAL DOWNSTREAM ETCH SYSTEMS (SAND ; SAND-96-8241)

RESULTS FROM MODELING AND SIMULATION OF CHEMICAL DOWNSTREAM ETCH SYSTEMS (SAND ; SAND-96-8241)
Paper図書
MEEKS, E.// VOSEN, S.R.// SHON, J.W.// LARSON, R.S.// FOX, C.A.// BUCHENAUER. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
Other Libraries in Japan
  • Author HeadingMEEKS, E. VOSEN, S.R. SHON, J.W. LARSON...

COMPUTATIONAL SIMULATION OF DIAMOND CHEMICAL VAPOR DEPOSITION IN PREMIXED C/SUB 2/H/SUB 2//O/SUB 2//H/SUB 2/ AND CH/SUB 4//O/SUB 2/ STRAINED FLAMES (SAND ; SAND-92-8462C)

COMPUTATIONAL SIMULATION OF DIAMOND CHEMICAL VAPOR DEPOSITION IN PREMIXED C/SUB 2/H/SUB 2//O/SUB 2//H/SUB 2/ AND CH/SUB 4//O/SUB 2/ STRAINED FLAMES (SAND ; SAND-92-8462C)
Paper図書
MEEKS, E.// KEE, R.J.// DANDY, D.S.// COLTRIN, M.E. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1992.
Other Libraries in Japan
  • Author HeadingMEEKS, E. KEE, R.J. DANDY, D.S. COLTRIN...

SPIN (VERSION 3.83): A FORTRAN PROGRAM FOR MODELING ONEDIMENSIONAL ROTATING-DISK/STAGNATION-FLOW CHEMICAL VAPOR DEPOSITION REACTORS (SAND ; SAND-91-8003)

SPIN (VERSION 3.83): A FORTRAN PROGRAM FOR MODELING ONEDIMENSIONAL ROTATING-DISK/STAGNATION-FLOW CHEMICAL VAPOR DEPOSITION REACTORS (SAND ; SAND-91-8003)
Paper図書
COLTRIN, M.E.// KEE, R.J.// EVANS, G.H.// MEEKS, E.// RUPLEY, F.M.// GRCAR, J.F. (SANDIA NATIONAL LABS., LIVERMORE, CA (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1991.
Other Libraries in Japan
  • Author HeadingCOLTRIN, M.E. KEE, R.J. EVANS, G.H. MEEKS, E. RUPLEY, F.M. GRCAR, J.F.

California : an Englishman's impressions of the Golden state

California : an Englishman's impressions of the Golden state
Paper図書
by Arthur T. Johnson ; with illustrations by E. Nora MeekS. Paul & Co.1913
Other Libraries in Japan

Measurement of Frequency Response in Short Thermocouple Wires. Progress Report, May - Oct. 1991 NASA-CR-187821 N92-11339 NAS-126187821

Measurement of Frequency Response in Short Thermocouple Wires. Progress Report, May - Oct. 1991 NASA-CR-187821 N92-11339 NAS-126187821
Microform規格・テクニカルリポート類
Forney, L. J, Meeks, E. L, Ma, J<LS-N92/11339>
National Diet Library

Frequency Response of a Supported Thermocouple Wire: Effects of Axial Conduction. Progress Report, Oct. 1990 - Mar. 1991 NASA-CR-188069 N91-20457 NAS-126188069 E-196662

Frequency Response of a Supported Thermocouple Wire: Effects of Axial Conduction. Progress Report, Oct. 1990 - Mar. 1991 NASA-CR-188069 N91-20457 NAS-126188069 E-196662
Microform規格・テクニカルリポート類
Forney, L. J, Meeks, E. L, Fralick, G. C<LS-N91/20457>
National Diet Library

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