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Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Digital文書・図像類
OGIWARA, Toshiya, NAGATA, Takahiro, YOSHIKAWA, Hideki2019-03-07
Available onlineOther Libraries in Japan
  • Author HeadingOGIWARA, Toshiya NAGATA, Takahiro YOSHIKAWA, H...

Raw data files for Fig. 6 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Raw data files for Fig. 6 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Digital文書・図像類
OGIWARA, Toshiya, NAGATA, Takahiro, YOSHIKAWA, Hideki2019-03-07
Available onlineOther Libraries in Japan
  • Author HeadingOGIWARA, Toshiya NAGATA, Takahiro YOSHIKAWA, H...

Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Digital文書・図像類
OGIWARA, Toshiya, NAGATA, Takahiro, YOSHIKAWA, Hideki2019-03-07
Available onlineOther Libraries in Japan
  • Author HeadingOGIWARA, Toshiya NAGATA, Takahiro YOSHIKAWA, H...

Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Digital文書・図像類
OGIWARA, Toshiya, NAGATA, Takahiro, YOSHIKAWA, Hideki2019-03-07
Available onlineOther Libraries in Japan
  • Author HeadingOGIWARA, Toshiya NAGATA, Takahiro YOSHIKAWA, H...

多層薄膜試料のオージェ深さ方向分析の研究

多層薄膜試料のオージェ深さ方向分析の研究
PaperDigital博士論文障害者向け資料あり
荻原俊也 [著]<UT51-99-M46>
Available onlineNational Diet Library

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