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Use of air gap structures to lower intralevel capacitance SAND-97-0330C DE97 003197 CONF-9702501

Use of air gap structures to lower intralevel capacitance SAND-97-0330C DE97 003197 CONF-9702501
Microform規格・テクニカルリポート類
Fleming, J. G, Roherty-Osmun, E1997<LS-DE97/003197>
National Diet Library

Chemical vapor deposition of ternary refractory nitrides for diffusion barrier applications SAND-96-0701C DE96 011817 CONF-96061042

Chemical vapor deposition of ternary refractory nitrides for diffusion barrier applications SAND-96-0701C DE96 011817 CONF-96061042
Microform規格・テクニカルリポート類
Smith, P. M, Custer, J. S, Fleming, J. G, Roherty-Osmun, E, Cohn, M1996<LS-DE96/011817>
National Diet Library

Growth and properties of W-B-N diffusion barriers deposited by chemical vapor deposition SAND-95-2250C DE96 001726 CONF-95101611

Growth and properties of W-B-N diffusion barriers deposited by chemical vapor deposition SAND-95-2250C DE96 001726 CONF-95101611
Microform規格・テクニカルリポート類
Fleming, J. G, Roherty-Osmun, E, Custer, J, Smith, P. M, Reid, J. S1995<LS-DE96/001726>
National Diet Library

CHEMICAL VAPOR DEPOSITION OF TERNARY REFRACTORY NITRIDES FOR DIFFUSION BARRIER APPLICATIONS (SAND ; SAND-96-0701C)

CHEMICAL VAPOR DEPOSITION OF TERNARY REFRACTORY NITRIDES FOR DIFFUSION BARRIER APPLICATIONS (SAND ; SAND-96-0701C)
Paper図書
SMITH, P.M.// CUSTER, J.S.// FLEMING, J.G.// ROHERTY-OSMUN, E.// COHN, M.// JONES, R.V. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
Other Libraries in Japan
  • Author HeadingSMITH, P.M. CUSTER, J.S. FLEMING, J.G. ROHERTY-OSMUN, E. COHN, M. JONES, R.V.

WETTING OXIDIZED FE, NI, CO ALLOY WITH COPPER (SAND ; SAND-90-2412)

WETTING OXIDIZED FE, NI, CO ALLOY WITH COPPER (SAND ; SAND-90-2412)
Paper図書
BEAVIS, L.C.// ROHERTY-OSMUN, E.// RITCHEY, M.B. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1993.
Other Libraries in Japan
  • Author HeadingBEAVIS, L.C. ROHERTY-OSMUN, E. RITCHEY, M.B.

GROWTH AND PROPERTIES OF W-B-N DIFFUSION BARRIERS DEPOSITED BY CHEMICAL VAPOR DEPOSITION (SAND ; SAND-95-2250C)

GROWTH AND PROPERTIES OF W-B-N DIFFUSION BARRIERS DEPOSITED BY CHEMICAL VAPOR DEPOSITION (SAND ; SAND-95-2250C)
Paper図書
FLEMING, J.G.// ROHERTY-OSMUN, E.// CUSTER, J.// SMITH, P.M.// REID, J.S.// NICOLET, M.A. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1995.
Other Libraries in Japan
  • Author HeadingFLEMING, J.G. ROHERTY-OSMUN, E. CUSTER, J. SMITH, P.M. REID, ...

CHEMICAL VAPOR DEPOSITION AND CHARACTERIZATION OF TUNGSTEN BORON ALLOY FILMS (SAND ; SAND-93-2445C)

CHEMICAL VAPOR DEPOSITION AND CHARACTERIZATION OF TUNGSTEN BORON ALLOY FILMS (SAND ; SAND-93-2445C)
Paper図書
SMITH, P.M.// FLEMING, J.G.// LUJAN, R.D.// ROHERTY-OSMUN, E.// REID, J.S.// HOCHBERG, A.K.// ROBERTS, D.A. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1993.
Other Libraries in Japan
  • Author HeadingSMITH, P.M. FLEMING, J.G. LUJAN, R.D. ROHERTY-OSMUN, E. REID, J.S. HOCHBERG, A.K. ROB...

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