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EMLC 2006 : 22nd European Mask and Lithography Conference : 23-26 January 2006, Dresden, Germany

EMLC 2006 : 22nd European Mask and Lithography Conference : 23-26 January 2006, Dresden, Germany
Paper図書
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology ... [et al.]SPIEc2006
Other Libraries in Japan
  • Author Heading...ger, Uwe F. W. VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik BACUS (Technical group) Socie...

EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany

EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany
Paper図書
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--the Society for Microelectronics, Micro- and Precision Engineering (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe (Germany) ; cooperating organizations, SEMI Europe ... [et al.] ; copublished by, SPIE--the International Society for Optical Engineering and VDE Verlag GmbH (Germany)SPIEc2005
Other Libraries in Japan
  • Author Heading...ger, Uwe F. W. VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik Institut für Mikrostrukturtec...

16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany

16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany
Paper図書
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) ; cooperating organization, Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany)SPIEc2000
Other Libraries in Japan
  • Author Heading...Behringer, Uwe VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik Forschungszentrum Karlsruhe. ...

THz Conference 2000 : 8th International Conference on Terahertz Electronics, 28-29 September 2000

THz Conference 2000 : 8th International Conference on Terahertz Electronics, 28-29 September 2000
Paper図書
Darmstadt University of Technology, Institut für Hochfrequenztechnik/THz Conference 2000 in cooperation with GMM, VDE/VDE [sic]-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik, ITG, Informationstechnische Gesellschaft im VDE (organizers) ; and technical co-sponsered [sic] by IEEE MTT/AP German Chapter and the IEEE German Section ; [edited by Chih-I Lin, Manuel Rodriguez-Gironés, Victoria Ichizli]VDE-Verlagc2000
Other Libraries in Japan
  • Author Heading...requenztechnik VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik Informationstechnische Gesell...

15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany

15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany
Paper図書
Uwe Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany), Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany) ; cooperating organizations, SEMI-Europe--Semiconductor Equipment and Materials International, BACUS (USA), SPIE--the International Society for Optical EngineeringSPIEc1999
Other Libraries in Japan
  • Author Heading...Behringer, Uwe VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik Forschungszentrum Karlsruhe. ...

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