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Advanced etch technology and process integration for nanopatterning XI : 24-28 April 2022 : San Jose, California, United States : 23-27 May 2022 : online : 2022, ------. (SPIE Proceedings ; 12056)

Advanced etch technology and process integration for nanopatterning XI : 24-28 April 2022 : San Jose, California, United States : 23-27 May 2022 : online : 2022, ------. (SPIE Proceedings ; 12056)
Paper図書
SPIE[2022]<M17-23-365>
National Diet Library
  • LCCTA2005

2016 IEEE international conference on plasma science : (ICOPS 2016) : Banff, Alberta, Canada : 19-23 June 2016 : 43rd ICOPS : Jun 2016, Banff, Canada.

2016 IEEE international conference on plasma science : (ICOPS 2016) : Banff, Alberta, Canada : 19-23 June 2016 : 43rd ICOPS : Jun 2016, Banff, Canada.
Paper図書
IEEE[2016]<M17-18-1171>
National Diet Library
  • LCCTA2005

Advanced etch technology for nanopatterning IV : 23-25 February 2015 : San Jose, California, United States : SPIE etch conference : international symposium on advanced lithography : Feb 2015, San Jose, CA. (SPIE Proceedings ; 9428)

Advanced etch technology for nanopatterning IV : 23-25 February 2015 : San Jose, California, United States : SPIE etch conference : international symposium on advanced lithography : Feb 2015, San Jose, CA. (SPIE Proceedings ; 9428)
Paper図書
SPIE[2015]<M17-15-2754>
National Diet Library
  • LCCTA2005

Plasma-based materials science and engineering : April 6-10, 2015 : San Francisco, California, USA : Apr 2015, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 1803)

Plasma-based materials science and engineering : April 6-10, 2015 : San Francisco, California, USA : Apr 2015, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 1803)
Paper図書
Cambridge University Press[2015]<M17-17-473>
National Diet Library
  • LCCTA2005

2013 IEEE 40th international conference on plasma sciences : (ICOPS 2013) : San Francisco, California, USA : 16-21 June 2013 : Jun 2013, San Francisco, CA.

2013 IEEE 40th international conference on plasma sciences : (ICOPS 2013) : San Francisco, California, USA : 16-21 June 2013 : Jun 2013, San Francisco, CA.
Paper図書
IEEEc2013.<M17-14-1391>
National Diet LibraryOther Libraries in Japan
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2012 abstracts IEEE international conference on plasma science : (ICOPS 2012) : Edinburgh, United Kingdom : 8-13 July 2012 : 39th IEEE international conference on plasma science : mini-course in plasma medicine and plasma healthcare : ICOPS2012 conference : Jul 2012, Edinburgh, UK.

2012 abstracts IEEE international conference on plasma science : (ICOPS 2012) : Edinburgh, United Kingdom : 8-13 July 2012 : 39th IEEE international conference on plasma science : mini-course in plasma medicine and plasma healthcare : ICOPS2012 conference : Jul 2012, Edinburgh, UK.
Paper図書
IEEEc2012.<M17-13-2350>
National Diet LibraryOther Libraries in Japan
  • LCCTA2005

2009 IEEE 36th international conference on plasma sciences -- abstracts : (ICOPS 2009) : San Diego, California, USA : 1-5 June 2009. : Jun 2009, San Diego, CA.

2009 IEEE 36th international conference on plasma sciences -- abstracts : (ICOPS 2009) : San Diego, California, USA : 1-5 June 2009. : Jun 2009, San Diego, CA.
Paper図書
IEEEc2009.<M17-11-121>
National Diet LibraryOther Libraries in Japan
  • LCCTA2005

Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, R.P.H. Chang, B. Abeles. (Materials Research Society symposia proceedings ; v. 38)

Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, R.P.H. Chang, B. Abeles. (Materials Research Society symposia proceedings ; v. 38)
Paper図書
Materials Research Societyc1985.<M15-A1043>
National Diet LibraryOther Libraries in Japan
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Plasma processing and synthesis of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A. / editors, J. Szekely, D. Apelian. (Materials Research Society symposia proceedings ; v. 30)

Plasma processing and synthesis of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A. / editors, J. Szekely, D. Apelian. (Materials Research Society symposia proceedings ; v. 30)
Paper図書
North-Hollandc1984.<M15-A1826>
National Diet LibraryOther Libraries in Japan
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Proceedings of the fourth Symposium on Plasma Processing / edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky. (Proceedings)

Proceedings of the fourth Symposium on Plasma Processing / edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky. (Proceedings)
Paper図書
Dielectrics and Insulation and Electronics Divisions, Electrochemical Societyc1983.<M15-A1764>
National Diet Library
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Plasma processing : proceedings of the third Symposium on Plasma Processing / edited by J. Dieleman, R.G. Frieser, G.S. Mathad ; [sponsored by] Dielectrics and Insulation and Electronics Divisions. (Proceedings)

Plasma processing : proceedings of the third Symposium on Plasma Processing / edited by J. Dieleman, R.G. Frieser, G.S. Mathad ; [sponsored by] Dielectrics and Insulation and Electronics Divisions. (Proceedings)
Paper図書
Electrochemical Societyc1982.<M15-A1355>
National Diet Library
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Plasma processing and synthesis of materials III : symposium held April 17-19, 1990, San Francisco, California, U.S.A.

Plasma processing and synthesis of materials III : symposium held April 17-19, 1990, San Francisco, California, U.S.A.
Paper図書
editors, Diran Apelian, Julian SzekelyMaterials Research Societyc1991
Other Libraries in Japan
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Process diagnostics : materials, combustion, fusion : symposium held April 5-7, 1988, Reno, Nevada, U.S.A.

Process diagnostics : materials, combustion, fusion : symposium held April 5-7, 1988, Reno, Nevada, U.S.A.
Paper図書
editors, A.K. Hays, A.C. Eckbreth, G.A. CampbellMaterials Research Societyc1988
Other Libraries in Japan
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IEEE conference record-abstracts / IEEE International Conference on Plasma Science ; sponsored by the IEEE Nuclear and Plasma Sciences Society.

IEEE conference record-abstracts / IEEE International Conference on Plasma Science ; sponsored by the IEEE Nuclear and Plasma Sciences Society.
Paper図書
Institute of Electrical and Electronics Engineersc1976-<MC241-49>
National Diet Library
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IEEE conference record-abstracts / International Conference on Plasma Science ; sponsored by the IEEE Nuclear and Plasma Sciences Society.

IEEE conference record-abstracts / International Conference on Plasma Science ; sponsored by the IEEE Nuclear and Plasma Sciences Society.
Paper図書
Institute of Electrical and Electronics Engineersc1975.<MC241-49>
National Diet Library
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Plasma processing and synthesis of materials : symposium held April 21-23, 1987, Anaheim, California, U.S.A.

Plasma processing and synthesis of materials : symposium held April 21-23, 1987, Anaheim, California, U.S.A.
Paper図書
editors, Diran Apelian, Julian SzekelyMaterials research Societyc1987
Other Libraries in Japan
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Proceedings of the Sixth Symposium on Plasma Processing

Proceedings of the Sixth Symposium on Plasma Processing
Paper図書
edited by G.S. Mathad, G.C. Schwartz, R.A. GottschoElectrochemical Societyc1987
Other Libraries in Japan
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Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
Paper図書
editors, R.P.H. Chang, B. AbelesMaterials Research Societyc1985
Other Libraries in Japan
  • LCCTA2005

Proceedings of the International Conference on Plasma Science and Technology : June 4-7, 1986, Beijing, China = [Kuo chi teng li tzu tʿi kʿo hsüeh yü chi shu hui i lun wen chi]

Proceedings of the International Conference on Plasma Science and Technology : June 4-7, 1986, Beijing, China = [Kuo chi teng li tzu tʿi kʿo hsüeh yü chi shu hui i lun wen chi]
Paper図書
sponsored by the Chinese Society of Theoretical and Applied Mechanics, the Beijing Society of Plasma Science and TechnologyScience Pressc1986
Other Libraries in Japan
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Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.

Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
Paper図書
editors, J.W. Coburn, R.A. Gottscho, D.W. HessMaterials Research Societyc1986
Other Libraries in Japan
  • LCCTA2005