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3次元ナノメートル分析技術の開発
3次元ナノメートル分析技術の開発
Paper
図書
高井, 幹夫, 大阪大学
1996-1998
<Y151-H08044148>
National Diet Library
Subject Heading
イオンマイクロプローブ 集束イオンビーム TOF-SIMS ナノフアブリケーシヨン ナノメートル3次元分析 電界放射電子源
プロセス誘起欠陥
ナノ構造
界面バリヤ制御電子スピン共鳴法による微小領域
プロセス誘起欠陥
の評価
界面バリヤ制御電子スピン共鳴法による微小領域プロセス誘起欠陥の評価
Paper
図書
村上, 浩一, 筑波大学
1987-1988
<Y151-S62550220>
National Diet Library
Subject Heading
シリコン
プロセス誘起欠陥
off-center置換位置N 不純物 電子スピン共鳴 界...
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