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薄いSOI活性層の熱安定化構造の開発
薄いSOI活性層の熱安定化構造の開発
Paper
図書
田部, 道晴, 静岡大学
2000-2002
<Y151-H12555087>
National Diet Library
Subject Heading
SOI
熱凝集
シリコン アイランド化 自己配列 MOSFET
SOI層の
熱凝集
現象を利用したSiアイランドの選択形成と光学素子応用
SOI層の熱凝集現象を利用したSiアイランドの選択形成と光学素子応用
Paper
図書
石川靖彦, 静岡大学 [著]
[石川靖彦]
2001-2003
<Y151-H13650011>
National Diet Library
Subject Heading
SOI /
熱凝集
/ Siアイランド / 細線 / パターニング / 光導波...
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