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ナノ構造の制御された
高誘電体薄膜
のCVDプロセス
ナノ構造の制御された高誘電体薄膜のCVDプロセス
Paper
図書
小宮山, 宏, 東京大学
1994-1995
<Y151-H06555232>
National Diet Library
Subject Heading
CVD ナオ構造
高誘電体薄膜
有機金属錯体
放射光励起ガスソースCVDによる
高誘電体薄膜
の低温形成
放射光励起ガスソースCVDによる高誘電体薄膜の低温形成
Paper
図書
庭野, 道夫, 東北大学
1991-1993
<Y151-H03452149>
National Diet Library
Subject Heading
放射光
高誘電体薄膜
低温薄膜形成 半導体表面 光励起反応 CVD
Reached to the end of result.
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