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集積電子回路におけるフイールド酸化膜上の
高配向薄膜
配線の形成
集積電子回路におけるフイールド酸化膜上の高配向薄膜配線の形成
Paper
図書
野矢, 厚, 北見工業大学
1998-1999
<Y151-H10650300>
National Diet Library
Subject Heading
集積回路 配線
高配向薄膜
集積電子回路における
高配向薄膜
配線層のエピタキシヤル成長による作製
集積電子回路における高配向薄膜配線層のエピタキシヤル成長による作製
Paper
図書
野矢, 厚, 北見工業大学
1996-1998
<Y151-H08650361>
National Diet Library
Subject Heading
集積回路
高配向薄膜
金属-半導体コンタクト エピタキシヤル
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