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基板回転型
CVD装置
開発の基礎研究
基板回転型CVD装置開発の基礎研究
Paper
図書
荻野, 文丸, 京都大学
1993-1994
<Y151-H05453094>
National Diet Library
Subject Heading
CVD装置
淀み点流れ 回転円板流れ 境界層
Si系超格子デバイス作製のための原子制御
CVD装置
の開発研究
Si系超格子デバイス作製のための原子制御CVD装置の開発研究
Paper
図書
室田, 淳一, 東北大学
1995-1997
<Y151-H07555409>
National Diet Library
Subject Heading
原子制御
CVD装置
Si系超格子デバイス 瞬時加熱CVD法 プラズマ表面処理 ...
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