Search results 3
Digital博士論文障害者向け資料あり
National Diet Library
- Subject HeadingLa-silicate, metal gate, tungsten carbide, interface ...
- Note (General)...lements in the metal gates. In addition ......has shown that metal gate materials affe...... the impact of metal gate should be clar...... grain size of metal gates strongly impa......e variability, metal gates with grain le......in this study, metal gate electrodes wit......orm nano-sized metal gate. Multi-stackin......e to grains in metal gate electrode. Electron eff show...
- Alternative TitleA Study on Metal Gate Electrodes with Nano-Sized Gr...
Digital博士論文
Available onlineOther Libraries in Japan
- Subject HeadingLa-silicate, metal gate, tungsten carbide, interface ...
- Note (General)...lements in the metal gates. In addition ......has shown that metal gate materials affe...... the impact of metal gate should be clar...... grain size of metal gates strongly impa......e variability, metal gates with grain le......in this study, metal gate electrodes wit......orm nano-sized metal gate. Multi-stackin......e to grains in metal gate electrode. Electron eff show...
- Alternative TitleA Study on Metal Gate Electrodes with Nano-Sized Gr...
Digital博士論文
Available onlineOther Libraries in Japan
- Subject HeadingHigh-k Metal Gate Mobility CMOS DRAM 高誘電率 メタルゲー...