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Materials for microlithography : radiation-sensitive polymers / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984. (ACS symposium series)

Materials for microlithography : radiation-sensitive polymers / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984. (ACS symposium series)
Paper図書
The Society1984.<M15-A2628>
National Diet LibraryOther Libraries in Japan
  • Subject Heading...-- Congresses. Microlithography -- Materials -- Congresses. Microelectroni...

Microelectronic polymers

Microelectronic polymers
Paper図書
edited by Maung S. HtooM. Dekkerc1989
Other Libraries in Japan
  • Subject HeadingPolymers and polymerization Microlithography -- Materials Microelectronics -- Materials
  • Subject Heading (ID)Polymers and polymerization Microlithography -- Materials Microelectronics -- Materials

Materials development for direct write technologies : symposium held April 24-26, 2000, San Francisco, California, U.S.A.

Materials development for direct write technologies : symposium held April 24-26, 2000, San Francisco, California, U.S.A.
Paper図書
editors, Douglas B. Chrisey ... [et al.]Materials Research Societyc2001
Other Libraries in Japan
  • Subject Heading...als Congresses Microlithography -- Materials Congresses Integrated circuit...
  • Subject Heading (ID)...als Congresses Microlithography -- Materials Congresses Integrated circuit...

Polymers in microlithography : materials and processes

Polymers in microlithography : materials and processes
Paper図書
Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editorAmerican Chemical Society1989
Other Libraries in Japan
  • Subject HeadingPolymers -- Congresses Photoresists -- Congresses Microlithography -- Materials -- Congresses
  • Subject Heading (ID)Polymers -- Congresses Photoresists -- Congresses Microlithography -- Materials -- Congresses

Electronic and photonic applications of polymers

Electronic and photonic applications of polymers
Paper図書
Murrae J. Bowden, editor, S. Richard Turner, editorAmerican Chemical Society1988
Other Libraries in Japan
  • Subject Heading... -- Congresses Microlithography -- Materials -- Congresses
  • Subject Heading (ID)... -- Congresses Microlithography -- Materials -- Congresses

Polymers for high technology : electronics and photonics

Polymers for high technology : electronics and photonics
Paper図書
Murrae J. Bowden, editor, S. Richard Turner, editor ; developed from a symposium sponsored by the Division of Polymeric Materials--Science and Engineering at the 192nd Meeting of the American Chemical Society, Anaheim, California, September 7-12, 1986American Chemical Society, 19871987
Other Libraries in Japan
  • Subject Heading... -- Congresses Microlithography -- Materials -- Congresses Microelectronic...
  • Subject Heading (ID)... -- Congresses Microlithography -- Materials -- Congresses Microelectronic...

Materials for microlithography : radiation-sensitive polymers

Materials for microlithography : radiation-sensitive polymers
Paper図書
L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984The Society1984
Other Libraries in Japan
  • Subject Heading... -- Congresses Microlithography -- Materials -- Congresses Microelectronic...
  • Subject Heading (ID)... -- Congresses Microlithography -- Materials -- Congresses Microelectronic...

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