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Materials for microlithography : radiation-sensitive polymers / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984. (ACS symposium series)

Materials for microlithography : radiation-sensitive polymers / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984. (ACS symposium series)
Paper図書
The Society1984.<M15-A2628>
National Diet LibraryOther Libraries in Japan
  • Subject Heading...-- Congresses. Microlithography -- Materials -- Congresses. Microelectronics -- Materials...

Polymers in microlithography : materials and processes

Polymers in microlithography : materials and processes
Paper図書
Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editorAmerican Chemical Society1989
Other Libraries in Japan

Electronic and photonic applications of polymers

Electronic and photonic applications of polymers
Paper図書
Murrae J. Bowden, editor, S. Richard Turner, editorAmerican Chemical Society1988
Other Libraries in Japan

Polymers for high technology : electronics and photonics

Polymers for high technology : electronics and photonics
Paper図書
Murrae J. Bowden, editor, S. Richard Turner, editor ; developed from a symposium sponsored by the Division of Polymeric Materials--Science and Engineering at the 192nd Meeting of the American Chemical Society, Anaheim, California, September 7-12, 1986American Chemical Society, 19871987
Other Libraries in Japan

Materials for microlithography : radiation-sensitive polymers

Materials for microlithography : radiation-sensitive polymers
Paper図書
L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984The Society1984
Other Libraries in Japan

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