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Ion implantation in compound semiconductors for high-performance electronic devices
SAND-96-0802C DE96 008169 CONF-9605026
Ion implantation in compound semiconductors for high-performance electronic devices SAND-96-0802C DE96 008169 CONF-9605026
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規格・テクニカルリポート類
Zolper, J. C, Baca, A. G, Sherwin, M. E, Klem, J. F
1996
<LS-DE96/008169>
National Diet Library
ION IMPLANTATION IN COMPOUND SEMICONDUCTORS FOR HIGH-PERFORMANCE ELECTRONIC DEVICES
(SAND ; SAND-96-0802C)
ION IMPLANTATION IN COMPOUND SEMICONDUCTORS FOR HIGH-PERFORMANCE ELECTRONIC DEVICES (SAND ; SAND-96-0802C)
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ZOLPER, J.C.// BACA, A.G.// SHERWIN, M.E.// KLEM, J.F. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))
Sandia National Laboratories(Sandia National Laboratories)
1996.
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