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Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. : MRS spring meeting : symposium C, "advances and challenges in chemical mechanical planarization" : Apr 2007, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 991)

Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. : MRS spring meeting : symposium C, "advances and challenges in chemical mechanical planarization" : Apr 2007, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 991)
紙図書
Materials Research Societyc2007.<M17-08-301>
国立国会図書館
  • 著者標目... Symposium C, "Advances and Challenges in Chemical Mechanical Planarization" (2007 : San Francisco, Calif...

Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.

Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.
紙図書
editors, Gerfield Zwicker ... [et al.]Materials Research Societyc2007
全国の図書館
  • 一般注記"...Symposium C, "Advances and Challenges in Chemical Mechanical Planarization," held April 10-12 at the 200...
  • 著者標目...Spring Meeting Advances and Challenges in Chemical Mechanical Planarization

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