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Specification of the figure and finish of EUV mirrors in terms of performance requirements BNL-60902 DE95 002927 CONF-94091774

Specification of the figure and finish of EUV mirrors in terms of performance requirements BNL-60902 DE95 002927 CONF-94091774
マイクロ規格・テクニカルリポート類
Church, E. L, Takacs, P. Z1994<LS-DE95/002927>
国立国会図書館

Specification of the figure and finish of EUV mirrors in terms of performance requirements. Revision 11/94 BNL-60902-Rev.11/94 DE95 005689

Specification of the figure and finish of EUV mirrors in terms of performance requirements. Revision 11/94 BNL-60902-Rev.11/94 DE95 005689
マイクロ規格・テクニカルリポート類
Church, E. L, Takacs, P. Z1994<LS-DE95/005689>
国立国会図書館

BASIC program for power spectrum estimation. Revision BNL-49035-Rev.5/94 DE95 002228

BASIC program for power spectrum estimation. Revision BNL-49035-Rev.5/94 DE95 002228
マイクロ規格・テクニカルリポート類
Church, E. L, Takacs, P. Z1994<LS-DE95/002228>
国立国会図書館

Measurement and analysis of scatter from silicon wafers BNL-60899 DE95 002411 CONF-94072331

Measurement and analysis of scatter from silicon wafers BNL-60899 DE95 002411 CONF-94072331
マイクロ規格・テクニカルリポート類
Stover, J. C, Bernt, M. L, Church, E. L, Takacs, P. Z1994<LS-DE95/002411>
国立国会図書館

Profiling and light scattering studies of Si surfaces BNL-60904 DE95 002931 CONF-9502461

Profiling and light scattering studies of Si surfaces BNL-60904 DE95 002931 CONF-9502461
マイクロ規格・テクニカルリポート類
Church, E. L, Takacs, P. Z, Stover, J. C1994<LS-DE95/002931>
国立国会図書館

Image quality, surface statistics and all that BNL-60900 DE95 002465 CONF-93072261

Image quality, surface statistics and all that BNL-60900 DE95 002465 CONF-93072261
マイクロ規格・テクニカルリポート類
Church, E. L, Takacs, P. Z1993<LS-DE95/002465>
国立国会図書館

Surface specification in terms of system performance BNL-60901 DE95 002449 CONF-93072262

Surface specification in terms of system performance BNL-60901 DE95 002449 CONF-93072262
マイクロ規格・テクニカルリポート類
Church, E. L, Takacs, P. Z1993<LS-DE95/002449>
国立国会図書館

Specification of the surface figure and finish of optical elements in terms of system performance BNL-47476 DE95 002222 CONF-92092953

Specification of the surface figure and finish of optical elements in terms of system performance BNL-47476 DE95 002222 CONF-92092953
マイクロ規格・テクニカルリポート類
Church, E. L, Takacs, P. Z1992<LS-DE95/002222>
国立国会図書館

SPECIFICATION OF THE FIGURE AND FINISH OF EUV MIRRORS IN TERMS OF PERFORMANCE REQUIREMENTS. REVISION 11/94 (BNL ; BNL-60902(REV.11/94))

SPECIFICATION OF THE FIGURE AND FINISH OF EUV MIRRORS IN TERMS OF PERFORMANCE REQUIREMENTS. REVISION 11/94 (BNL ; BNL-60902(REV.11/94))
紙図書
CHURCH, E.L.// TAKACS, P.Z. (BROOKHAVEN NATIONAL LAB., UPTON, NY (UNITED STATES))Brookhaven National Laboratory(Brookhaven National Laboratory)1994.
全国の図書館
  • 著者標目CHURCH, E.L. TAKACS, P.Z.

SPECIFICATION OF THE FIGURE AND FINISH OF EUV MIRRORS IN TERMS OF PERFORMANCE REQUIREMENTS (BNL ; BNL-60902)

SPECIFICATION OF THE FIGURE AND FINISH OF EUV MIRRORS IN TERMS OF PERFORMANCE REQUIREMENTS (BNL ; BNL-60902)
紙図書
CHURCH, E.L.// TAKACS, P.Z. (BROOKHAVEN NATIONAL LAB., UPTON, NY (UNITED STATES))Brookhaven National Laboratory(Brookhaven National Laboratory)1994.
全国の図書館
  • 著者標目CHURCH, E.L. TAKACS, P.Z.

SURFACE SPECIFICATION IN TERMS OF SYSTEM PERFORMANCE (BNL ; BNL-60901)

SURFACE SPECIFICATION IN TERMS OF SYSTEM PERFORMANCE (BNL ; BNL-60901)
紙図書
CHURCH, E.L.// TAKACS, P.Z. (BROOKHAVEN NATIONAL LAB., UPTON, NY (UNITED STATES))Brookhaven National Laboratory(Brookhaven National Laboratory)1993.
全国の図書館
  • 著者標目CHURCH, E.L. TAKACS, P.Z.

PROFILING AND LIGHT SCATTERING STUDIES OF SI SURFACES (BNL ; BNL-60904)

PROFILING AND LIGHT SCATTERING STUDIES OF SI SURFACES (BNL ; BNL-60904)
紙図書
CHURCH, E.L.// TAKACS, P.Z.// STOVER, J.C. (BROOKHAVEN NATIONAL LAB., UPTON, NY (UNITED STATES))Brookhaven National Laboratory(Brookhaven National Laboratory)1994.
全国の図書館
  • 著者標目CHURCH, E.L. TAKACS, P.Z. STOVER, J.C.

BASIC PROGRAM FOR POWER SPECTRUM ESTIMATION (BNL ; BNL-49035(REV.5/94))

BASIC PROGRAM FOR POWER SPECTRUM ESTIMATION (BNL ; BNL-49035(REV.5/94))
紙図書
CHURCH, E.L.// TAKACS, P.Z. (BROOKHAVEN NATIONAL LAB., UPTON, NY (UNITED STATES))Brookhaven National Laboratory(Brookhaven National Laboratory)1994.
全国の図書館
  • 著者標目CHURCH, E.L. TAKACS, P.Z.

IMAGE QUALITY, SURFACE STATISTICS AND ALL THAT (BNL ; BNL-60900)

IMAGE QUALITY, SURFACE STATISTICS AND ALL THAT (BNL ; BNL-60900)
紙図書
CHURCH, E.L.// TAKACS, P.Z. (BROOKHAVEN NATIONAL LAB., UPTON, NY (UNITED STATES))Brookhaven National Laboratory(Brookhaven National Laboratory)1993.
全国の図書館
  • 著者標目CHURCH, E.L. TAKACS, P.Z.

SPECIFYING THE SURFACE FINISH OF X-RAY MIRRORS (BNL ; BNL-60378)

SPECIFYING THE SURFACE FINISH OF X-RAY MIRRORS (BNL ; BNL-60378)
紙図書
CHURCH, E.L.// TAKACS, P.Z. (BROOKHAVEN NATIONAL LAB., UPTON, NY (UNITED STATES))Brookhaven National Laboratory(Brookhaven National Laboratory)1993.
全国の図書館
  • 著者標目CHURCH, E.L. TAKACS, P.Z.

MEASUREMENT AND ANALYSIS OF SCATTER FROM SILICON WAFERS (BNL ; BNL-60899)

MEASUREMENT AND ANALYSIS OF SCATTER FROM SILICON WAFERS (BNL ; BNL-60899)
紙図書
STOVER, J.C.// BERNT, M.L.// CHURCH, E.L.// TAKACS, P.Z. (BROOKHAVEN NATIONAL LAB., UPTON, NY (UNITED STATES))Brookhaven National Laboratory(Brookhaven National Laboratory)1994.
全国の図書館
  • 著者標目STOVER, J.C. BERNT, M.L. CHURCH, E.L. TAKACS, P.Z.

SPECIFICATION OF THE SURFACE FIGURE AND FINISH OF OPTICAL ELEMENTS IN TERMS OF SYSTEM PERFORMANCE (BNL ; BNL-47476)

SPECIFICATION OF THE SURFACE FIGURE AND FINISH OF OPTICAL ELEMENTS IN TERMS OF SYSTEM PERFORMANCE (BNL ; BNL-47476)
紙図書
CHURCH, E.L.// TAKACS, P.Z. (BROOKHAVEN NATIONAL LAB., UPTON, NY (UNITED STATES))Brookhaven National Laboratory(Brookhaven National Laboratory)1992.
全国の図書館
  • 著者標目CHURCH, E.L. TAKACS, P.Z.

INTEGRATING FIGURE AND FINISH MEASUREMENTS WITH SURFACE PROFILING INSTRUMENTS (BNL ; BNL-47220)

INTEGRATING FIGURE AND FINISH MEASUREMENTS WITH SURFACE PROFILING INSTRUMENTS (BNL ; BNL-47220)
紙図書
TAKACS, P.Z.// CHURCH, E.L. (BROOKHAVEN NATIONAL LAB., UPTON, NY (UNITED STATES))Brookhaven National Laboratory(Brookhaven National Laboratory)1992.
全国の図書館
  • 著者標目TAKACS, P.Z. CHURCH, E.L.

STEP-HEIGHT STANDARD FOR SURFACE PROFILER CALIBRATION (BNL ; BNL-49632)

STEP-HEIGHT STANDARD FOR SURFACE PROFILER CALIBRATION (BNL ; BNL-49632)
紙図書
TAKACS, P.Z.// LI, M.X.O.// FURENLID, K.// CHURCH, E.L. (BROOKHAVEN NATIONAL LAB., UPTON, NY (UNITED STATES))Brookhaven National Laboratory(Brookhaven National Laboratory)1993.
全国の図書館
  • 著者標目TAKACS, P.Z. LI, M.X.O. FURENLID, K. CHURCH, E.L.

EFFECTS OF THE NON-VANISHING TIP SIZE IN MECHANICAL PROFILE MEASUREMENTS (BNL ; BNL-45578)

EFFECTS OF THE NON-VANISHING TIP SIZE IN MECHANICAL PROFILE MEASUREMENTS (BNL ; BNL-45578)
紙図書
CHURCH, E.L.//TAKACS, P.Z. (BROOKHAVEN NATIONAL LAB., UPTON,NY (USA))Brookhaven National Laboratory(Brookhaven National Laboratory)1990.
全国の図書館
  • 著者標目CHURCH, E.L. TAKACS, P.Z.