「"SOMMARGREN, G.E."」の検索結果 | NDLサーチ

検索結果 17 件

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Performance of a two mirror, four reflection, ring field imaging system UCRL-JC-119621 DE95 014691 CONF-940917711

マイクロ規格・テクニカルリポート類

Sommargren, G. E1995<LS-DE95/014691>

国立国会図書館

Performance of a two-mirror, four-reflection, ring-field optical system at (lambda)=13 nm UCRL-JC-123013 DE96 013883 CONF-96049317

マイクロ規格・テクニカルリポート類

La Fontaine, B, Gaines, D. P, Kania, D. R, Sommargren, G. E, Baker, S. L1996<LS-DE96/013883>

国立国会図書館

Coating strategy for enhancing illumination uniformity in a lithographic condenser UCRL-JC-119629 DE95 014371 CONF-94091778

マイクロ規格・テクニカルリポート類

Gaines, D. P, Vernon, S. P, Sommargren, G. E, Kania, D. R1995<LS-DE95/014371>

国立国会図書館

X-ray characterization of a four-bounce projection system UCRL-JC-119628 DE95 014676 CONF-940917714

マイクロ規格・テクニカルリポート類

Gaines, D. P, Vernon, S. P, Sommargren, G. E, Fuchs, D1995<LS-DE95/014676>

国立国会図書館

PERFORMANCE OF A TWO MIRROR, FOUR REFLECTION, RING FIELD IMAGING SYSTEM (UCRL ; UCRL-JC-119621)

紙図書

SOMMARGREN, G.E. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1995.

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著者標目SOMMARGREN, G.E.

X-RAY CHARACTERIZATION OF A FOUR-BOUNCE PROJECTION SYSTEM (UCRL ; UCRL-JC-119628)

紙図書

GAINES, D.P.// VERNON, S.P.// SOMMARGREN, G.E.// FUCHS, D. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1995.

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著者標目GAINES, D.P. VERNON, S.P. SOMMARGREN, G.E. FUCHS, D.

PERFORMANCE OF A TWO-MIRROR, FOUR-REFLECTION, RING-FIELD OPTICAL SYSTEM AT .LAMBDA.=13 NM (UCRL ; UCRL-JC-123013)

紙図書

LA FONTAINE, B.// GAINES, D.P.// KANIA, D.R.// SOMMARGREN, G.E.// BAKER, S.L.// CIARLO, D. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1996.

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著者標目LA FONTAINE, B. GAINES, D.P. KANIA, D.R. SOMMARGREN, G.E. BAKER, S.L. CIARLO, D.

COATING STRATEGY FOR ENHANCING ILLUMINATION UNIFORMITY IN A LITHOGRAPHIC CONDENSER (UCRL ; UCRL-JC-119629)

紙図書

GAINES, D.P.// VERNON, S.P.// SOMMARGREN, G.E.// KANIA, D.R. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1995.

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著者標目GAINES, D.P. VERNON, S.P. SOMMARGREN, G.E. KANIA, D.R.

POINT DIFFRACTION INTERFEROMETRY AT SOFT X-RAY WAVELENGTHS (UCRL ; UCRL-JC-114496)

紙図書

SOMMARGREN, G.E.// HOSTETLER, R. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1993.

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著者標目SOMMARGREN, G.E. HOSTETLER, R.

PRECISION OPTICAL ASPHERES FOR EXTREME ULTRAVIOLET LITHOGRAPHY (UCRL ; UCRL-JC-123033)

紙図書

KANIA, D.R.// GAINES, D.P.// SWEENEY, D.S.// SOMMARGREN, G.E.// LA FONTAINE, B.// VERNON, S.P.// TICHNOR, D.A.// BJORKHOLM, J.E.// ZERNIKE, F.// KESTNER, R.N. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1996.

全国の図書館

著者標目... SWEENEY, D.S. SOMMARGREN, G.E. LA FONTAINE, B. VERNON, S.P. ...

X-RAY CHARACTERIZATION OF A THREE-ELEMENT CONDENSER SYSTEM FOR SOFT X-RAY PROJECTION LITHOGRAPHY (UCRL ; UCRL-JC-114074)

紙図書

GAINES, D.P.// SOMMARGREN, G.E.// VERNON, S.P.// ENGLISH, R.E. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1993.

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著者標目GAINES, D.P. SOMMARGREN, G.E. VERNON, S.P. ENGLISH, R.E.

CONDENSER OPTICS, PARTIAL COHERENCE, AND IMAGING FOR SOFT X-RAY PROJECTION LITHOGRAPHY (UCRL ; UCRL-JC-110134)

紙図書

SOMMARGREN, G.E.// SEPPALA, L.G. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1992.

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著者標目SOMMARGREN, G.E. SEPPALA, L.G.

HIGH AVERAGE POWER LASER FOR EUV LITHOGRAPHY (UCRL ; UCRL-JC-119630)

紙図書

KANIA, D.R.// GAINES, D.P.// HERMANN, M.// HONIG, J.// HOSTETLER, R.// LEVESQUE, R.// SOMMARGREN, G.E.// SPITZER, R.C.// VERNON, S.P. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1995.

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