堀江, 三喜男, HORIE, MIKIOMicro System Technologies 2003 (International Conference & Exhibition on Micro Electro, Opto, Mechanical Systems and Components),Herbert Reichl(Editor),2003 Franzis Verlag GmbH, 85586 Point, ISBN 3-7723-7020-92003Micro System Technologies 2003, International Conference & Exhibition on Micro Electro, Opto, Mechanical Systems and Componentsp.334-341