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Gettering of transition metals by cavities in silicon formed by helium ion implantation SAND-96-0869C DE96 015014 CONF-9609941

Gettering of transition metals by cavities in silicon formed by helium ion implantation SAND-96-0869C DE96 015014 CONF-9609941
マイクロ規格・テクニカルリポート類
Petersen, G. A, Myers, S. M, Follstaedt, D. M1996<LS-DE96/015014>
国立国会図書館

GETTERING OF TRANSITION METALS BY CAVITIES IN SILICON FORMED BY HELIUM ION IMPLANTATION (SAND ; SAND-96-0869C)

GETTERING OF TRANSITION METALS BY CAVITIES IN SILICON FORMED BY HELIUM ION IMPLANTATION (SAND ; SAND-96-0869C)
紙図書
PETERSEN, G.A.// MYERS, S.M.// FOLLSTAEDT, D.M. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
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