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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 栗山 大成Eric Lebrasseur平川 顕二岩瀬 正幸小笠原 宗博依田 孝三田 吉郎
- Alternative Title
- Fabrication of high-aspect vertical deep trench by two-step parameter ramping
- Periodical title
- 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]
- No. or year of volume/issue
- 36:2019.11.19-21
- Volume
- 36
- Pages
- 3p
- Publication date of volume/issue (W3CDTF)
- 2019-11