圧電MEMS光スキャナのフィードバック制御に向けた静電振角センサの検討

Journal name: 「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編] 40:2023.11.6-9

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Material Type: 記事
Title: 圧電MEMS光スキャナのフィードバック制御に向けた静電振角センサの検討
Author/Editor: 小田優太朗
浅利友隆
谷雅直
年吉洋
Author Heading: 小田優太朗
浅利友隆
谷雅直
年吉洋
Alternative Title: Electrostatic position sensor for piezoelectric MEMS scanner
Periodical title: 「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編]
No. or year of volume/issue: 40:2023.11.6-9
Volume: 40
Pages: 4p
Publication date of volume/issue (W3CDTF): 2023-11
Publication (Periodical Title): [東京] : Institute of Electrical Engineers of Japan
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: YH247-299
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 033243537
http://id.ndl.go.jp/bib/033243537
Bibliographic Record Category (NDL): 632