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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 小田 優太朗浅利 友隆谷 雅直年吉 洋
- Alternative Title
- Electrostatic position sensor for piezoelectric MEMS scanner
- Periodical title
- 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]
- No. or year of volume/issue
- 40:2023.11.6-9
- Volume
- 40
- Pages
- 4p
- Publication date of volume/issue (W3CDTF)
- 2023-11