雑誌電子通信学会論文誌 C
Volume numberC C 69(10)(226)
Article磁界圧着形マグネトロ...

磁界圧着形マグネトロンスパッタ法によるa-Si薄膜の作成と特性

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磁界圧着形マグネトロンスパッタ法によるa-Si薄膜の作成と特性

Call No. (NDL)
Z16-607
Bibliographic ID of National Diet Library
3104984
Material type
記事
Author
畑 朋延 他
Publisher
東京 : 電子通信学会
Publication date
1986-10
Material Format
Digital
Journal name
電子通信学会論文誌. C = The Transactions of the Institute of Electronics and Communication Engineers of Japan / 電子通信学会 編 69(10) 1986.10
Publication Page
p.p1239～1247
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Digital

Material Type
記事
Title
磁界圧着形マグネトロンスパッタ法によるa-Si薄膜の作成と特性
Author/Editor
畑 朋延 他
Author Heading
畑 朋延
Periodical title
電子通信学会論文誌. C = The Transactions of the Institute of Electronics and Communication Engineers of Japan / 電子通信学会 編
No. or year of volume/issue
69(10) 1986.10
Volume
69
Issue
10
Pages
p1239～1247
Publication date of volume/issue (W3CDTF)
1986-10