磁界圧着形マグネトロンスパッタ法によるa-Si薄膜の作成と特性
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- Material Type
- 記事
- Author/Editor
- 畑 朋延 他
- Author Heading
- Periodical title
- 電子通信学会論文誌. C = The Transactions of the Institute of Electronics and Communication Engineers of Japan / 電子通信学会 編
- No. or year of volume/issue
- 69(10) 1986.10
- Volume
- 69
- Issue
- 10
- Pages
- p1239~1247
- Publication date of volume/issue (W3CDTF)
- 1986-10