雑誌真空
オゾン添加反応性直流...

オゾン添加反応性直流マグネトロンスパッタによるITOの成膜 (小特集「反応性スパッタリングとターゲット」)

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オゾン添加反応性直流マグネトロンスパッタによるITOの成膜(小特集「反応性スパッタリングとターゲット」)

Call No. (NDL)
Z16-474
Bibliographic ID of National Diet Library
5476047
Material type
記事
Author
重里 有三ほか
Publisher
東京 : 日本真空協会
Publication date
2000-08
Material Format
Paper
Journal name
真空 = Journal of the Vacuum Society of Japan 43(8) 2000.8
Publication Page
p.779~784
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Paper Digital

Material Type
記事
Author/Editor
重里 有三
伊藤 宜弘
今 真人 他
Periodical title
真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue
43(8) 2000.8
Volume
43
Issue
8
Pages
779~784