オゾン添加反応性直流マグネトロンスパッタによるITOの成膜(小特集「反応性スパッタリングとターゲット」)

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Material Type: 記事
Title: オゾン添加反応性直流マグネトロンスパッタによるITOの成膜
Author/Editor: 重里有三
伊藤宜弘
今真人他
Series Title: 小特集「反応性スパッタリングとターゲット」
Author Heading: 重里有三
伊藤宜弘
今真人
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 43(8) 2000.8
Volume: 43
Issue: 8
Pages: 779～784
Publication date of volume/issue (W3CDTF): 2000-08
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5476047
http://id.ndl.go.jp/bib/5476047
Bibliographic Record Category (NDL): 632