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薄膜 (応用物理学選書 ; 3)

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薄膜

(応用物理学選書 ; 3)

Material type
図書
Author
金原粲 著 ; 藤原英夫 著
Publisher
裳華房
Publication date
1979.6
Material Format
Paper
Capacity, size, etc.
389p ; 22cm
NDC
549
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Notes on use

Note (General):

各章末:文献

Detailed bibliographic record

Contents:

各章末:文献(Provided by: 公共図書館蔵書)

Summary, etc.:

初学者のための“薄膜の物理”の入門書。薄膜についての最も基本的な現象、物理的性質について、どうしても知っておいて欲しい理論や実験結果を詳しく解説し、重要な応用にまで触れた。(Provided by: 出版情報登録センター(JPRO))

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Table of Contents

  • 1 薄膜の製作法と膜厚測定法

  • 1.1 真空蒸着法

  • 1.2 スパッタリング法

  • 1.3 気相成長法

  • 1.4 膜厚の測定法

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Paper

Material Type
図書
ISBN
4-7853-2503-8
Title
Title Transcription
ハクマク
Author/Editor
金原粲 著 ; 藤原英夫 著
Title Heading
薄膜 ハクマク
Author Heading
金原, 粲 キンバラ, アキラ
藤原, 英夫 フジワラ, ヒデオ
Publication, Distribution, etc.
Publication Date
1979.6