Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

Journal of Vacuum Science & Technology. B, Microelectronics Processing and Phenomena

Volumes of this title

8(5)-8(6):1990.9/1990.10-1990.11/1990.12

8(1)-8(4):1990.1/1990.2-1990.7/1990.8

7(4)-7(6):1989.7/1989.8-1989.11/1989.12

7(1)-7(3):1989.1/1989.2-1989.5/1989.6

6(4)-6(6):1988.7/1988.8-1988.11/1988.12

Publisher: Published for the American Vacuum Society by the American Institute of Physics

Notes on use

Note (General)：: Description based on the latest issue"An Official Publication of the American Vacuum Society"

Related materials as well as pre- and post-revision versions

Search by Bookstore

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
Paper
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 雑誌
ISSN: 0734-211X
Title: Journal of Vacuum Science & Technology
Volume: B
Part Title: Microelectronics Processing and Phenomena
Publication, Distribution, etc.: New York, N.Y. : Published for the American Vacuum Society by the American Institute of Physics
Publication status: 刊行終了
Publication frequency: Bimonthly
Extent: v
Place of Publication (Country Code): US
Text Language Code: eng
NDLC: ZM35
ZN33
Note (General): Description based on the latest issue
"An Official Publication of the American Vacuum Society"
Holding library: 国立国会図書館
Year and volume of holding: 2nd Ser. 1(1):1983.1/3 - 8(6):1990.11/12
Call No.: Z53-Y133
Replaces: 分割前 : Journal of vacuum science & technology
https://ndlsearch.ndl.go.jp/books/R100000002-I000000126556
Continues: 継続後 : Journal of Vacuum Science & Technology. B
https://ndlsearch.ndl.go.jp/books/R100000002-I000000156914
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000131403
http://id.ndl.go.jp/bib/000000131403
Cataloging Rule: National Diet Library Cataloging Rules for Serials
Bibliographic Record Category (NDL): 231