Atomic collision research in Japan : progress report(29);2003

• Material Type: 雑誌
• Title: Atomic collision research in Japan : progress report
• Volume: (29);2003
• Author Heading: 原子衝突研究協会 ゲンシ ショウトツ ケンキュウ キョウカイ ( 00813895 )Authorities
• Publication, Distribution, etc.: Tokyo : Society for Atomic Collision Research
• Publication Date: 2003-12
• Publication Date (W3CDTF): 2003-12
• Year and volume of publication: [ ] -
• Size: 26 cm
• Place of Publication (Country Code): JP
• Text Language Code: eng
• NDLC: ZM35
• Note (General): Description based on the latest issue
• DOI: 10.11501/10980424; https://doi.org/10.11501/10980424
• Persistent ID (NDL): info:ndljp/pid/10980424; https://dl.ndl.go.jp/pid/10980424
• Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌; https://dl.ndl.go.jp/collections/A00002
• Producer: 国立国会図書館
• Production year (W3CDTF): 2018-03-09
• Date Accepted (W3CDTF): 2017-10-31T09:53:01+09:00
• Format (IMT): image/jp2
• Access Restrictions: 国立国会図書館内限定公開
• Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
• Availability of remote photoduplication service: 可
• Year and volume of holding: (7):1981 - (29):2003; Previous issues catalogued as monograph
• Call No.: Z63-B162
• Original Material (JPNO): 10038315
• Periodical Title (Persistent ID (NDL)): info:ndljp/pid/10980438; https://dl.ndl.go.jp/pid/10980438
• Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション; https://dl.ndl.go.jp

Table of Contents

CONTENTS//5～8

I ELECTRON IMPACT//1～10

Quantitative analysis of CF₄ produced in the SiO₂ etching process by c-C₄F₈, C₃F₈, and C₂F₆ plasmas using in-situ mass spectrometry/K. Furuya ; Y. Hatano/1～2

Generalized oscillator strength of nitric oxide for the valence shell excitations/N. Miyauchi ; H. Kuwabara ; L. F. Zhu ; Y. Ikeda ; Y. Sakai ; H. Suzuki ; T. Takayanagi ; C. Yamada ; S. Ohtani/3～4

Elastic scattering of electrons from water molecules/T. Ono ; M. Takahashi ; K. Tanaka ; K. Soejima ; A. Danjo/5～7