Proceedings of Symposium on Dry Process16;NOVEMBER 1994

• Material Type: 雑誌
• Title: Proceedings of Symposium on Dry Process
• Volume: 16;NOVEMBER 1994
• Publication, Distribution, etc.: Tokyo : Institute of Electrical Engineers of Japan
• Publication Date: 1994-11
• Publication Date (W3CDTF): 1994-11
• Year and volume of publication: [ ] - 22:2000
• Size: 28 cm
• Alternative Title: Dorai Purosesu Sinpozyumu
• Place of Publication (Country Code): JP
• Text Language Code: eng
• NDLC: ZM5; ZN31
• Note (General): Description based on the latest issue; Title in Japanese: Dorai Purosesu Sinpozyumu
• DOI: 10.11501/11019428; https://doi.org/10.11501/11019428
• Persistent ID (NDL): info:ndljp/pid/11019428; https://dl.ndl.go.jp/pid/11019428
• Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌; https://dl.ndl.go.jp/collections/A00002
• Producer: 国立国会図書館
• Production year (W3CDTF): 2018-03-09
• Date Accepted (W3CDTF): 2018-01-15T18:38:15+09:00
• Format (IMT): image/jp2
• Access Restrictions: 国立国会図書館内限定公開
• Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
• Availability of remote photoduplication service: 可
• Year and volume of holding: 7:1985 - 22:2000
• Call No.: Z63-B381
• Original Material (JPNO): 10041216
• Periodical Title (Persistent ID (NDL)): info:ndljp/pid/10997448; https://dl.ndl.go.jp/pid/10997448
• Continues (Persistent ID (NDL)): info:ndljp/pid/10997441; https://dl.ndl.go.jp/pid/10997441
• Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション; https://dl.ndl.go.jp

Table of Contents

THE 16th SYMPOSIUM ON DRY PROCESS PROGRAM = 第16回ドライプロセスシンポジウム プログラム//5～8

Thursday, Nobember 10, 1994 = 11月10日（木）//～116

Session I : PROCESSING PLASMA = Session I プロセス用プラズマ//～48

I-1 <Invited Paper> Comparison of the Ion Velocity Distribution in Different High Density Reactors (ECR, Helicon, DECR, ......)/N. Sadeghi/1～1

I-2 Real-Time Feedback Control of 2 -Dimensional Parameters in Etching Plasmas/P. L. G. Ventzek ; N. Yamada ; K. Kitamori ; Y. Sakai ; H. Tagashira/3～8