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Table of Contents
CONTENTS/
Semiconductors//943~
Effect of Surface Treatments after HF Etching on Oxidation of Si/Masatoshi EGAWA ; Hideaki IKOMA/943~
Contributions of Silicon-Hydride Radicals to Hydrogenated Amorphous Silicon Film Formation in Windowless Photochemical Vapor Deposition System/Yoshinori SAWADO ; Takeshi AKIYAMA ; Tomo UENO ; Koichi KAMISAKO ; Koichi KUROIWA ; Yasuo TARUI/950~
Si Epitaxy below 400℃ from Fluorinated Precursors SiF[n]H[m](n+m≤3) under In Situ Observation with Ellipsometry/Tetsuya AKASAKA ; Yuhzo ARAKI ; Isamu SHIMIZU/956~
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Bibliographic Record
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- Material Type
- 雑誌
- ISSN
- 0021-4922
- ISSN-L
- 0021-4922
- Volume
- Part. 1Part. 133(2)(396);FEBRUARY 1994
- Part Title
- Regular papers, brief communications & review papers : JJAP
- Author Heading
- 応用物理学会 オウヨウ ブツリ ガッカイ ( 00281497 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 1994-02
- Publication Date (W3CDTF)
- 1994-02