Growth and characterization of insulating oxide films on silicon
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Table of Contents
Contents
p7
1 Introduction
p1
REFERENCES
p5
2 Growth of Crystalline ZrO₂ Films on Si
p7
2.1 Introduction
p7
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- Material Type
- 博士論文
- Author/Editor
- 福本博文 [著]
- Author Heading
- 福本, 博文 フクモト, ヒロフミ
- Alternative Title
- Si上の酸化物絶縁体薄膜の形成と評価 Siジョウ ノ サンカブツ ゼツエンタイ ハクマク ノ ケイセイ ト ヒョウカ
- Degree grantor/type
- 広島大学
- Date Granted
- 平成3年3月25日
- Date Granted (W3CDTF)
- 1991
- Dissertation Number
- 甲第976号
- Degree Type
- 工学博士