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Development of in situ processing techniques using focused ion beam

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Material Type: 博士論文
Title: Development of in situ processing techniques using focused ion beam
Author/Editor: 徐征 [著]
Author Heading: 徐, 征シュイ, チョン
Alternative Title: 集束イオンビームによるその場加工技術の開発に関する研究シュウソクイオンビームニヨルソノバカコウギジュツノカイハツニカンスルケンキュウ
Degree grantor/type: 大阪大学
Date Granted: 平成3年10月28日
Date Granted (W3CDTF): 1991
Dissertation Number: 乙第5537号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Alias of Author: Xu, Zheng
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-91-X400
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000245455
http://id.ndl.go.jp/bib/000000245455
Bibliographic Record Category (NDL): 213