博士論文

ECRプラズマを用いて製作される微結晶立方晶BN膜の成長と物性

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ECRプラズマを用いて製作される微結晶立方晶BN膜の成長と物性

Call No. (NDL)
UT51-93-U324
Bibliographic ID of National Diet Library
000000265580
Persistent ID (NDL)
info:ndljp/pid/3071686
Material type
博士論文
Author
岡本雅樹 [著]
Publisher
-
Publication date
-
Material Format
Paper・Digital
Capacity, size, etc.
-
Name of awarding university/degree
広島大学,博士 (工学)
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博士論文

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Table of Contents

  • Contents

    p7

  • Preface

    p5

  • 1 Introduction

    p1

  • 1.1 Boron Nitride

    p1

  • 1.2 Preparation of Cubic Boron Nitride

    p5

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title
ECRプラズマを用いて製作される微結晶立方晶BN膜の成長と物性
Title Transcription
ECR プラズマ オ モチイテ セイサクサレル ビケッショウ リッポウショウ BNマク ノ セイチョウ ト ブッセイ
Author/Editor
岡本雅樹 [著]
Author Heading
岡本, 雅樹 オカモト, マサキ
Degree grantor/type
広島大学
Date Granted
平成5年3月25日
Date Granted (W3CDTF)
1993
Dissertation Number
甲第1155号
Degree Type
博士 (工学)