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博士論文

アモルファスシリコンのシリサイド化過程の研究

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アモルファスシリコンのシリサイド化過程の研究

Call No. (NDL)
UT51-93-V311
Bibliographic ID of National Diet Library
000000266083
Persistent ID (NDL)
info:ndljp/pid/3071924
Material type
博士論文
Author
河津祐之介 [著]
Publisher
-
Publication date
-
Material Format
Paper・Digital
Capacity, size, etc.
-
Name of awarding university/degree
筑波大学,博士 (工学)
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博士論文

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Table of Contents

Provided by：国立国会図書館デジタルコレクションLink to Help Page

  • 目次

  • §1 序論

    p1

  • §2 実験

    p6

  • 2.1 試料

    p6

  • 2.2 実験方法

    p9

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title
アモルファスシリコンのシリサイド化過程の研究
Title Transcription
アモルファス シリコン ノ シリサイドカ カテイ ノ ケンキュウ
Author/Editor
河津祐之介 [著]
Author Heading
河津, 祐之介 カワズ, ユウノスケ
Degree grantor/type
筑波大学
Date Granted
平成2年7月31日
Date Granted (W3CDTF)
1990
Dissertation Number
甲第796号
Degree Type
博士 (工学)