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博士論文

Study on atmospheric pressure CVD using organic silicon sources and ozone

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Study on atmospheric pressure CVD using organic silicon sources and ozone

Call No. (NDL)
UT51-94-P539
Bibliographic ID of National Diet Library
000000274051
Persistent ID (NDL)
info:ndljp/pid/3095988
Material type
博士論文
Author
藤野勝裕 [著]
Publisher
-
Date granted
平成5年3月18日
Material Format
Paper・Digital
Capacity, size, etc.
-
Degree grantor and degree
東京大学,博士 (工学)
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博士論文

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Table of Contents

Provided by：国立国会図書館デジタルコレクション

  • Contents

    p3

  • Preface(the purpose and overview of this dissertation)

    p1

  • Chapter 1 Introduction

    p1

  • 1-1 CVD Technology

    p1

  • 1-2 Conventional CVD

    p1

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title
Study on atmospheric pressure CVD using organic silicon sources and ozone
Author/Editor
藤野勝裕 [著]
Author Heading
藤野, 勝裕 フジノ, カツヒロ
Alternative Title
有機シリコンとオゾンによる常圧化学気相成長の研究 ユウキ シリコン ト オゾン ニ ヨル ジョウアツ カガク キソウ セイチョウ ノ ケンキュウ
Degree Grantor
東京大学
Date Granted
平成5年3月18日
Date Granted (W3CDTF)
1993
Dissertation Number
乙第11201号
Degree Type
博士 (工学)