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博士論文

Microfabrication using UV laser induced polymerization

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Microfabrication using UV laser induced polymerization

Call No. (NDL)
UT51-94-R36
Bibliographic ID of National Diet Library
000000274593
Persistent ID (NDL)
info:ndljp/pid/3096303
Material type
博士論文
Author
Abraha, Petros Abbay [著]
Publisher
-
Publication date
-
Material Format
Paper・Digital
Capacity, size, etc.
-
Name of awarding university/degree
名古屋大学,博士 (工学)
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博士論文

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Table of Contents

Provided by：国立国会図書館デジタルコレクションLink to Help Page

  • Contents

    p3

  • 1 Introduction

    p1

  • 2 Fabrication of Micro-molds using Mask-based Pattern Transfer

    p8

  • 2.1 Manufacturing Method

    p8

  • 2.2 Simulation of the accuracy of pattern transfer

    p10

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title
Microfabrication using UV laser induced polymerization
Author/Editor
Abraha, Petros Abbay [著]
Author Heading
Abraha, Petros Abbay アブラハ, ペトロス アバイ
Alternative Title
紫外線レーザ誘起重合反応によるマイクロ加工 シガイセン レーザ ユウキ ジュウゴウ ハンノウ ニ ヨル マイクロ カコウ
Degree grantor/type
名古屋大学
Date Granted
平成6年3月25日
Date Granted (W3CDTF)
1994
Dissertation Number
甲第2917号
Degree Type
博士 (工学)