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博士論文

Mechanism of film formation in electron cyclotron resonance plasma CVD

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Mechanism of film formation in electron cyclotron resonance plasma CVD

Call No. (NDL)
UT51-95-M117
Bibliographic ID of National Diet Library
000000285354
Persistent ID (NDL)
info:ndljp/pid/3082725
Material type
博士論文
Author
張梅 [著]
Publisher
-
Publication date
-
Material Format
Paper・Digital
Capacity, size, etc.
-
Name of awarding university/degree
大阪府立大学,博士 (工学)
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博士論文

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Table of Contents

Provided by：国立国会図書館デジタルコレクションLink to Help Page

  • Contents

    p1

  • 1 General Introduction

    p1

  • 1.1 Historical Background

    p1

  • 1.2 Objective of This Research

    p3

  • References

    p6

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title
Mechanism of film formation in electron cyclotron resonance plasma CVD
Author/Editor
張梅 [著]
Author Heading
張, 梅 チョウ, メイ
Alternative Title
ECRプラズマCVDにおける薄膜の成長機構 ECR プラズマ CVD ニ オケル ハクマク ノ セイチョウ キコウ
Degree grantor/type
大阪府立大学
Date Granted
平成7年3月31日
Date Granted (W3CDTF)
1995
Dissertation Number
甲第366号
Degree Type
博士 (工学)