The cover of this title could differ from library to library.

The cover of this title could differ from library to library.

Available with Digitized Contents Transmission Service

Find on the publisher's website

国立国会図書館デジタルコレクション

Available for viewing via the Digitized Contents Transmission Service for Individuals to official registered users of the NDL, who resides in Japan.

Become an official registered user >

軟X線による半導体極微細加工の研究

Call No. (NDL): UT51-95-T484
Bibliographic ID of National Diet Library: 000000289008
Persistent ID (NDL): info:ndljp/pid/3104495

Material type: 博士論文

Author: 小川太郎 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

Capacity, size, etc.: -

Name of awarding university/degree: 東京工業大学,博士 (工学)

Notes on use

Note (General)：: 博士論文

Search by Bookstore

Search by Bookstore

Read this material in an accessible format.

View materials in accessible formats for people with print disabilities (1Type)

Table of Contents

論文目録
目次
p1
第1章:緒論
p5
1.1 本研究の背景
p5
1.2 本研究の目的
p7

Search by Bookstore

Read in Disability Resources

Mina Search
- プレーンテキスト
  Registered users of Mina Search can download or stream this content.

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper Digital

Material Type: 博士論文
Title: 軟X線による半導体極微細加工の研究
Title Transcription: ナンXセンニヨルハンドウタイゴクビサイカコウノケンキュウ
Author/Editor: 小川太郎 [著]
Author Heading: 小川, 太郎オガワ, タロウ
Degree grantor/type: 東京工業大学
Date Granted: 平成6年4月30日
Date Granted (W3CDTF): 1994
Dissertation Number: 乙第2614号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-95-T484
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000289008
http://id.ndl.go.jp/bib/000000289008
Bibliographic Record Category (NDL): 213