軟X線による半導体極微細加工の研究

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軟X線による半導体極微細加工の研究

Call No. (NDL): UT51-95-T484
Bibliographic ID of National Diet Library: 000000289008
Persistent ID (NDL): info:ndljp/pid/3104495

Material type: 博士論文

Author: 小川太郎 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

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Name of awarding university/degree: 東京工業大学,博士 (工学)

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Note (General)：: 博士論文

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Table of Contents

Provided by：国立国会図書館デジタルコレクション

論文目録
目次
p1
第1章:緒論
p5
1.1 本研究の背景
p5
1.2 本研究の目的
p7

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Paper Digital

Material Type: 博士論文
Title: 軟X線による半導体極微細加工の研究
Title Transcription: ナンXセンニヨルハンドウタイゴクビサイカコウノケンキュウ
Author/Editor: 小川太郎 [著]
Author Heading: 小川, 太郎オガワ, タロウ
Degree grantor/type: 東京工業大学
Date Granted: 平成6年4月30日
Date Granted (W3CDTF): 1994
Dissertation Number: 乙第2614号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-95-T484
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000289008
http://id.ndl.go.jp/bib/000000289008
Bibliographic Record Category (NDL): 213